Material |
High-purity mono-crystal alumina Al2O3 |
－ |
Purity |
＞99.996 |
% |
Dislocation density |
<105 |
cm-2 |
Surface Orientation |
C-plane（0001）±0.2 |
Degrees |
Off-set Angle toward M-axis |
0.2±0.1 |
Degrees |
Off-set Angle toward A-axis |
0.2±0.1 |
Degrees |
| Diameter |
Φ50.8 ± 0.08 Φ50.0 ± 0.08 |
mm |
| Thickness |
430±15 330±15 |
μm |
| Orientation Primary Flat |
A-axis（11-20）± 0.2 |
Degrees |
| Flat Length |
16±0.5 |
mm |
| Front Sourface |
Fine-polished (ready for using ) |
－ |
| Frontside Surface Roughness(Ra) |
≦ 0.3 |
nm |
| Backside Surface Roughness (Ra) |
0.5 ~ 1 |
μm |
| TTV |
≦ 8 |
μm |
| BOW |
0～-9 |
μm |
| WARP |
≦ 9 |
μm |
| Edge chamfering |
C=45 |
Degrees |
| Packaging |
cleanliness class 100, 25pcs or single packed with nitrogen/vaccum |
Box |
