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| Properties |
Target |
Tolerance |
Material |
High Purity and Monocrystalline Al2O3 |
>99.995% |
Diameter |
150 mm (6 inch) |
±0.1 mm |
Thickness |
1000µm |
±25um |
Surface orientation of a-plane |
0° |
±0.1° |
Surface Orientation of m-plane |
0.35° |
±0.1° |
Primary Flat Length |
47.5mm |
±2 mm |
| Primary Flat Orientation |
a-plane |
±1.5° |
| Chamfering Shape |
45° (Double Side) |
±5° |
| Chamfering width |
150µm |
±50 µm |
| Back side Roughness |
0.8µm |
±0.3 µm |
Front side Roughness |
≦ 0.2µm |
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| Total Thickness Variation, TTV |
≦ 25µm |
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| SORI |
≦ 30µm |
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| BOW |
± 20µm |
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