::(주)경일코퍼레이션
 
 
 
 
     
 
Item Specifications/Characteristics Unit

Material

High-purity mono-crystal alumina Al2O3

Purity

>99.996

%

Dislocation density

<105

cm-2

Surface Orientation

C-plane(0001)±0.2

Degrees

Off-set Angle toward M-axis

0.2±0.1

Degrees

Off-set Angle toward A-axis

0.2±0.1

Degrees

Diameter Φ100.0 ± 0.10 mm
Thickness 650±15 μm
Orientation Primary Flat A-axis(11-20)± 0.2 Degrees
Flat Length 32.5±1 mm
Front Sourface Fine-polished (ready for using )
Frontside Surface Roughness(Ra) ≦ 0.3 nm
Backside Surface Roughness (Ra) 0.5 ~ 1 μm
TTV ≦ 15 μm
BOW 0~-15 μm
WARP ≦ 9 μm
Edge chamfering C=45 Degrees
Packaging cleanliness class 100, 25pcs or single packed with nitrogen/vaccum Box